Tescom 12-1A11AADE-031 12 Series Miniature Ultra High Purity Pressure Reducing Regulator

Description

TESCOM 12 Series is a miniature ultra high purity IGS/VCR pressure reducing regulator. The 12 Series offers 5 Ra or 10 Ra microinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 250 mm Hg-15, 30, 60, 100 psig / 250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM. Applications: OEM Tools, Gas Boxes, Low-Pressure Gas Cabinets. Product of choice for state-of-the-art OEM gas systems. Ultra-sensitive pressure control enhances MFC performance. Superior performance in a wide range of applications. Flows from 2 scfm to 120 SLPM. Unsurpassed droop and repeatability in a micro component. Metal-to-metal diaphragm to body seal for high leak integrity. 10 Ra or 5 Ra microinch internal surface finish. Meets SEMI F19 and SEMI Modular Interface specifications. Basic Series: 12; Flow Option: Standard Flow Model; Type: Non-Captured Bonnet; Material (Body): 316L VAR Stainless Steel, Material (Trim): Hastelloy (Material to be Hastelloy or equivalent per ASTM B 574), Material (Seat): PCTFE, Material (Internal Finish): 10 Ra; Outlet Pressure: 0-30 psig / 0-2.1 bar; Hand Knob Color: Black; Custom Suffix: AADE-031